A semi-analytical method to study the temperature evolutions of a slab and a semi-infinite target for plasma immersion ion implantation

DOI10.1016/J.IJHEATMASSTRANSFER.2006.08.019zbMATH Open1124.80385OpenAlexW2012658886MaRDI QIDQ870902FDOQ870902

F. B. Yeh

Publication date: 15 March 2007

Published in: International Journal of Heat and Mass Transfer (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.ijheatmasstransfer.2006.08.019

zbMATH Keywords

Laplace integral transformplasma energy fluxpulse bias voltagepulse duty cycle

Mathematics Subject Classification ID

Laplace transform (44A10)

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