A semi-analytical method to study the temperature evolutions of a slab and a semi-infinite target for plasma immersion ion implantation

DOI10.1016/J.IJHEATMASSTRANSFER.2006.08.019MaRDI QIDQ870902zbMATH OpenOpenAlexFDO

Authors F. B. Yeh

Publication date 15 March 2007

Published in International Journal of Heat and Mass Transfer (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.ijheatmasstransfer.2006.08.019

zbMATH Keywords

Laplace integral transformplasma energy fluxpulse bias voltagepulse duty cycle

Mathematics Subject Classification ID

Laplace transform (44A10)

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(2)

• The effects of plasma characteristics on the melting time at the front surface of a film on a substrate: an exact solution
• Analysis of models for calculation of temperature of anode plasma electrolytic heating

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