Influence of inhomogeneity and nonlinearity of multilayer structure on dopant redistribution in delta-doped area during epitaxial overgrowth (Q974546)
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scientific article; zbMATH DE number 5716711
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| English | Influence of inhomogeneity and nonlinearity of multilayer structure on dopant redistribution in delta-doped area during epitaxial overgrowth |
scientific article; zbMATH DE number 5716711 |
Statements
Influence of inhomogeneity and nonlinearity of multilayer structure on dopant redistribution in delta-doped area during epitaxial overgrowth (English)
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3 June 2010
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epitaxial growth of heterostructure
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delta-doping
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alternative approach of modeling
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0.8075047
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0.8035026
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0.80232656
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0.79584116
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0.7952076
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0.78809524
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0.7877604
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