Influence of mechanical stress in a multilayer structure on spatial distribution of dopants in implanted-junction and diffusion-junction rectifiers (Q3566465)
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scientific article; zbMATH DE number 5717902
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| English | Influence of mechanical stress in a multilayer structure on spatial distribution of dopants in implanted-junction and diffusion-junction rectifiers |
scientific article; zbMATH DE number 5717902 |
Statements
INFLUENCE OF MECHANICAL STRESS IN A MULTILAYER STRUCTURE ON SPATIAL DISTRIBUTION OF DOPANTS IN IMPLANTED-JUNCTION AND DIFFUSION-JUNCTION RECTIFIERS (English)
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8 June 2010
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\(p\)-\(n\) junctions in heterostructure
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decreasing of depth of \(p\)-\(n\) junctions
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influence of mechanical stress on depth of \(p\)-\(n\) junctions
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0.773581326007843
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0.7326316237449646
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0.7034897208213806
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0.6821656823158264
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0.6789873242378235
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