Partly three-dimensional global modeling of a silicon Czochralski furnace. I: Principles, formulation and implementation of the model (Q978361)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Partly three-dimensional global modeling of a silicon Czochralski furnace. I: Principles, formulation and implementation of the model |
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Partly three-dimensional global modeling of a silicon Czochralski furnace. I: Principles, formulation and implementation of the model (English)
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24 June 2010
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computer simulation
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global modeling
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Czochralski method
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radiation
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semiconducting silicon
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