Dynamic characteristics of a beam angular-rate sensor (Q986310)
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scientific article; zbMATH DE number 5768772
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| English | Dynamic characteristics of a beam angular-rate sensor |
scientific article; zbMATH DE number 5768772 |
Statements
Dynamic characteristics of a beam angular-rate sensor (English)
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11 August 2010
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vibratory gyroscope
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MEMS
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rotating cantilever beam
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electrostatic and parametric excitation
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hill-type equation
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Fourier-type solution
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0.8263544
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0.8029796
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0.79277784
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0.79097784
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0.7884445
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0.78726715
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