Maximum a posteriori estimation of activation energies that control silicon self-diffusion (Q999024)
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scientific article; zbMATH DE number 5500826
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| English | Maximum a posteriori estimation of activation energies that control silicon self-diffusion |
scientific article; zbMATH DE number 5500826 |
Statements
Maximum a posteriori estimation of activation energies that control silicon self-diffusion (English)
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30 January 2009
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Bayesian estimation
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parameter estimation
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semiconductor processes
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rapid thermal processing
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0.85099995
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0.8346257
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0.8235738
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0.8191444
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0.8187103
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0.81440896
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0.81009454
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