Mathematical analyses of electrostatic MEMS switches

MaRDI QIDQ2923860zbMATH OpenFDO

Authors Le Zhao, Ruifeng Zhang

Publication date 3 November 2014

Published in Mathematica Applicata (Search for Journal in Brave)

zbMATH Keywords

asymptotic stabilitydynamic analysiselectrostatic switchenergy methodnonlinear spring

Mathematics Subject Classification ID

Qualitative investigation and simulation of ordinary differential equation models (34C60) Stability of solutions to ordinary differential equations (34D20) Electromagnetic effects in solid mechanics (74F15)

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Cited in

(7)

• Nonlinear dynamic analysis of MEMS switches by nonlinear modal analysis
• Control of bouncing in MEMS switches using double electrodes
• Mathematical modeling of electrostatic MEMS with tailored dielectric properties
• Unified nonlinear quasistatic and dynamic analysis of RF-MEMS switches
• Mixed Domain Macromodels for RF MEMS Capacitive Switches
• Dynamic pull-in phenomenon in MEMS resonators
• Impact dynamics of MEMS switches

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