Dynamics of electrostatic microelectromechanical systems actuators
From MaRDI portal
Micromechanical theories (74A60) Electromagnetic effects in solid mechanics (74F15) Analytic approximation of solutions (perturbation methods, asymptotic methods, series, etc.) of dynamical problems in solid mechanics (74H10) Stochastic and other probabilistic methods applied to problems in solid mechanics (74S60) Electro- and magnetostatics (78A30) Technical applications of optics and electromagnetic theory (78A55)
Abstract: Electrostatic actuators are simple but important switching devices for MEMS applications. Due to the difficulties associated with the electrostatic nonlinearity, precise mathematical description is often hard to obtain for the dynamics of these actuators. Here we present two sharp theorems concerning the dynamics of an undamped electrostatic actuator with one-degree of freedom, subject to linear and nonlinear elastic forces, respectively. We prove that both situations are characterized by the onset of one-stagnation-point periodic response below a well-defined pull-in voltage and a finite-time touch-down or collapse of the actuator above this pull-in voltage. In the linear-force situation, the stagnation level, pull-in voltage, and pull-in coordinate of the movable electrode may all be determined explicitly, following the recent work of Leus and Elata based on numerics. Furthermore, in the nonlinear-force situation, the stagnation level, pull-in voltage, and pull-in coordinate may be described completely in terms of the electrostatic and mechanical parameters of the model so that they approach those in the linear-force situation monotonically in the zero nonlinear-force limit.
Recommendations
- DYNAMICS OF ELECTROSTATICALLY ACTUATED MICRO-ELECTRO-MECHANICAL SYSTEMS: SINGLE DEVICE AND ARRAYS OF DEVICES
- On the static and dynamic response of electrostatic actuators
- Dynamics and global stability of beam-based electrostatic microactuators
- Dynamics of a canonical electrostatic MEMS/NEMS system
- Electrostatic MEMS: modelling, control, and applications
- DYNAMIC ANALYSIS OF MICRO-ELECTRO-MECHANICAL SYSTEMS
- Nonlinear mechanics of electrically actuated microplates
- Nonlinear dynamics of an electrically driven impact microactuator
- A hybrid solution for analyzing nonlinear dynamics of electrostatically-actuated microcantilevers
Cites work
- Direct and inverse problems related to MEMS
- Dynamical Solutions of Singular Wave Equations Modeling Electrostatic MEMS
- scientific article; zbMATH DE number 1897397 (Why is no real title available?)
- Multiplicity of solutions for a fourth order equation with power-type nonlinearity
- Nonlinear non-local elliptic equation modelling electrostatic actuation
- On a Fourth Order Nonlinear Elliptic Equation with Negative Exponent
- On a general family of nonautonomous elliptic and parabolic equations
- On the critical dimension of a fourth order elliptic problem with negative exponent
Cited in
(23)- Size dependent dynamic behavior of electrostatically actuated microbridges
- On the stability of periodic solutions with defined sign in MEMS via lower and upper solutions
- Stationary solutions to a nonlocal fourth-order elliptic obstacle problem
- Long-time dynamics for a nonlinear viscoelastic Kirchhoff plate equation
- Reinforced limit of a MEMS model with heterogeneous dielectric properties
- On the semilinear elliptic equations of electrostatic NEMS devices
- Transduction of electrochemical into mechanical oscillations
- Nonlinear dynamics of an electrically driven impact microactuator
- Mathematical analyses of electrostatic MEMS switches
- Identification of Electro-mechanical Actuators within Limited Stroke
- On the origin and the calculation of the force in electrostatic actuators
- Feasible Analytical Solutions for Electrostatic Parallel-Plate Actuator or Sensor
- Static and dynamic responses of a microcantilever with a T-shaped tip mass to an electrostatic actuation
- Dynamics and global stability of beam-based electrostatic microactuators
- BIFURCATION OF EQUILIBRIA IN MICROMACHINED ELASTIC STRUCTURES WITH ELECTROSTATIC ACTUATION
- Critical pull-in curves of MEMS actuators in presence of Casimir force
- Electrostatic comb drive actuators with variable gap: nonlinear dynamics at primary resonance
- Nonlinear problems inspired by the Born-Infeld theory of electrodynamics
- Recent advances on periodic motions in parallel-plate electrostatic actuators
- A multibody-based dynamic simulation method for electrostatic actuators
- The nonlinear electrostatic behavior for shaped electrode actuators
- On the static and dynamic response of electrostatic actuators
- Nonlinear analysis for a novel actuator
This page was built for publication: Dynamics of electrostatic microelectromechanical systems actuators
Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q2861712)
