Dynamics of electrostatic microelectromechanical systems actuators
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Technical applications of optics and electromagnetic theory (78A55) Electro- and magnetostatics (78A30) Micromechanical theories (74A60) Electromagnetic effects in solid mechanics (74F15) Analytic approximation of solutions (perturbation methods, asymptotic methods, series, etc.) of dynamical problems in solid mechanics (74H10) Stochastic and other probabilistic methods applied to problems in solid mechanics (74S60)
Abstract: Electrostatic actuators are simple but important switching devices for MEMS applications. Due to the difficulties associated with the electrostatic nonlinearity, precise mathematical description is often hard to obtain for the dynamics of these actuators. Here we present two sharp theorems concerning the dynamics of an undamped electrostatic actuator with one-degree of freedom, subject to linear and nonlinear elastic forces, respectively. We prove that both situations are characterized by the onset of one-stagnation-point periodic response below a well-defined pull-in voltage and a finite-time touch-down or collapse of the actuator above this pull-in voltage. In the linear-force situation, the stagnation level, pull-in voltage, and pull-in coordinate of the movable electrode may all be determined explicitly, following the recent work of Leus and Elata based on numerics. Furthermore, in the nonlinear-force situation, the stagnation level, pull-in voltage, and pull-in coordinate may be described completely in terms of the electrostatic and mechanical parameters of the model so that they approach those in the linear-force situation monotonically in the zero nonlinear-force limit.
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Cites work
- scientific article; zbMATH DE number 1897397 (Why is no real title available?)
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- Nonlinear non-local elliptic equation modelling electrostatic actuation
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Cited in
(23)- The nonlinear electrostatic behavior for shaped electrode actuators
- On the static and dynamic response of electrostatic actuators
- Nonlinear dynamics of an electrically driven impact microactuator
- On the stability of periodic solutions with defined sign in MEMS via lower and upper solutions
- A multibody-based dynamic simulation method for electrostatic actuators
- Reinforced limit of a MEMS model with heterogeneous dielectric properties
- Electrostatic comb drive actuators with variable gap: nonlinear dynamics at primary resonance
- Size dependent dynamic behavior of electrostatically actuated microbridges
- Feasible Analytical Solutions for Electrostatic Parallel-Plate Actuator or Sensor
- Nonlinear analysis for a novel actuator
- Mathematical analyses of electrostatic MEMS switches
- On the semilinear elliptic equations of electrostatic NEMS devices
- Critical pull-in curves of MEMS actuators in presence of Casimir force
- Long-time dynamics for a nonlinear viscoelastic Kirchhoff plate equation
- Transduction of electrochemical into mechanical oscillations
- Recent advances on periodic motions in parallel-plate electrostatic actuators
- Identification of Electro-mechanical Actuators within Limited Stroke
- Nonlinear problems inspired by the Born-Infeld theory of electrodynamics
- On the origin and the calculation of the force in electrostatic actuators
- BIFURCATION OF EQUILIBRIA IN MICROMACHINED ELASTIC STRUCTURES WITH ELECTROSTATIC ACTUATION
- Stationary solutions to a nonlocal fourth-order elliptic obstacle problem
- Dynamics and global stability of beam-based electrostatic microactuators
- Static and dynamic responses of a microcantilever with a T-shaped tip mass to an electrostatic actuation
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