A multibody-based dynamic simulation method for electrostatic actuators

DOI10.1007/S11071-007-9268-4MaRDI QIDQ840467zbMATH OpenOpenAlexFDO

Authors Jinam Kim, Wonkyu Moon, Ilhan Park, Sang-Kyu Lee, J. H. Choi, Daesung Bae

Publication date 11 September 2009

Published in Nonlinear Dynamics (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/s11071-007-9268-4

zbMATH Keywords

electromechanical couplingmultibody dynamicsdynamic behaviorpoint chargeelectrostatic actuatorrecursive dynamics formula

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Dynamics of multibody systems (70E55) Electromagnetic effects in solid mechanics (74F15)

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Cites work

• scientific article; zbMATH DE number 983155 (Why is no real title available?)
• Constrained Equations of Motion in Multibody Dynamics as ODE<scp>s</scp> on Manifolds
• DYNAMIC ANALYSIS OF MICRO-ELECTRO-MECHANICAL SYSTEMS
• Dynamics and Control of Electrostatic Structures
• Dynamics of flexible beams for multibody systems: A computational procedure
• Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in
• MST MEMS model order reduction: requirements and benchmarks

Cited in

(3)

• On the static and dynamic response of electrostatic actuators
• Chaotic vibrations of size-dependent flexible rectangular plates
• A methodology for fast finite element modeling of electrostatically actuated MEMS

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