A general modelling and control framework for electrostatically actuated mechanical systems

DOI10.1002/RNC.1027MaRDI QIDQ5704774zbMATH OpenOpenAlexFDO

Authors B. D. Kawade, W. P. Dayawansa, D. H. S. Maithripala, J. M. Berg

Publication date 15 November 2005

Published in International Journal of Robust and Nonlinear Control (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1002/rnc.1027

zbMATH Keywords

ANSYS simulationelectrostatic actuatorgeometric controlmicromechanical systemsstabilization

Mathematics Subject Classification ID

Control of mechanical systems (70Q05) Automated systems (robots, etc.) in control theory (93C85) Model systems in control theory (93C99) Stabilization of systems by feedback (93D15)

Recommendations

• Electrostatic MEMS: modelling, control, and applications
• Control of dynamic microsystems
• Flatness-based adaptive fuzzy control of electrostatically actuated MEMS using output feedback
• Input-shaping control of nonlinear MEMS
• Nonlocal problems in MEMS device control

Cites work

• Nonholonomic mechanics and control. With the collaboration of J. Baillieul, P. Crouch, and J. Marsden. With scientific input from P. S. Krishnaprasad, R. M. Murray, and D. Zenkov.

Cited in

(11)

• Electromechanical interactions in multibody systems containing electromechanical drives
• Flatness-based adaptive fuzzy control of electrostatically actuated MEMS using output feedback
• A generalized structural-parametric model of an electromagnetoelastic converter for nano- and micrometric movement control systems. III. Transformation of parametric structural circuits of an electromagnetoelastic converter for nano- and micrometric movement control systems
• Control of dynamic microsystems
• Electrostatic MEMS: modelling, control, and applications
• Tracking and robustness analysis for controlled microelectromechanical relays
• Design and experimental evaluation of a QFT contact task controller for electro‐hydraulic actuators
• Exact controllability and output feedback stabilization of a bimorph mirror
• Dynamics and Control of Electrostatic Structures
• Input-shaping control of nonlinear MEMS
• A multibody-based dynamic simulation method for electrostatic actuators

Describes a project that uses

Uses Software

• ANSYS

This page was built for publication: A general modelling and control framework for electrostatically actuated mechanical systems

Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q5704774)