Input-shaping control of nonlinear MEMS

DOI10.1007/S11071-007-9246-XMaRDI QIDQ840458zbMATH OpenOpenAlexFDO

Authors N. E. Zubov

Publication date 11 September 2009

Published in Nonlinear Dynamics (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/s11071-007-9246-x

zbMATH Keywords

MEMSreduced-order modelinginput-shaping controltorsional micromirror

Mathematics Subject Classification ID

Micromechanics of solids (74M25) Control, switches and devices (``smart materials) in solid mechanics (74M05)

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