Control of dynamic microsystems

DOI10.1080/00207721.2013.879231MaRDI QIDQ2792212zbMATH OpenOpenAlexFDO

Authors Sergey Edward Lyshevski

Publication date 8 March 2016

Published in International Journal of Systems Science. Principles and Applications of Systems and Integration (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1080/00207721.2013.879231

zbMATH Keywords

analysiscontrolLyapunov theorymicro-electromechanical systemsmicrosystemsoptimisation

Mathematics Subject Classification ID

Nonlinear systems in control theory (93C10) Control/observation systems governed by ordinary differential equations (93C15) Application models in control theory (93C95)

Recommendations

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Cites work

• Design of stabilizing PI and PID controllers
• Nonlinear control of constrained linear systems
• Optimal nonlinear, but continuous, feedback control of systems with saturating actuators
• Performance functionals and dynamic systems' optimization
• Quasi-continuous high-order sliding-mode controllers
• Robust control of nonlinear continuous-time systems with parameter uncertainties and input bounds
• Sliding mode control in dynamic systems

Cited in

(19)

• Flatness-based adaptive fuzzy control of electrostatically actuated MEMS using output feedback
• Integrated control for high accuracy complex system
• Physical characteristics of the sensing elements of feedback sensors combined with thermomechanical actuators for plant micromotion control systems
• On the control design and robustness analysis for high-density microcantilever arrays
• Simultaneous control of multiple MEMS microrobots
• Electrostatic MEMS: modelling, control, and applications
• Model validation and performance prediction in the design of micro systems
• Tracking and robustness analysis for controlled microelectromechanical relays
• A steerable, untethered, 250 60 m MEMS mobile micro-robot
• Dynamics in Manipulation and Actuation of Nano-Particles
• The dynamic behavior of a parametrically excited time-periodic MEMS taking into account parametric errors
• 2D Observer-Based Control of a Vascular Microrobot
• scientific article; zbMATH DE number 2200740 (Why is no real title available?)
• Control of microfluidic systems: two examples, results, and challenges
• A general modelling and control framework for electrostatically actuated mechanical systems
• Languages and Compilers for Parallel Computing
• Pattern-forming systems for control of large arrays of actuators
• Design of a nonsingular adaptive fuzzy backstepping controller for electrostatically actuated microplates
• Input-shaping control of nonlinear MEMS

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