Modeling and control of nonlinear micro-distributed systems

DOI10.1016/S0362-546X(96)00117-4MaRDI QIDQ4374214zbMATH OpenOpenAlexFDO

Authors P. K. C. Wang

Publication date 8 March 1999

Published in Nonlinear Analysis: Theory, Methods & Applications (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/s0362-546x(96)00117-4

zbMATH Keywords

feedback stabilizationfree boundary problemNavier-Stokes equationsbeam equationmathematical modelscantilever beamelectrostatic actuatorsmicro-distributed systemsmicromachined deformable mirror

Mathematics Subject Classification ID

Control/observation systems governed by partial differential equations (93C20)

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Cites work

• A continuum theory of elastic material surfaces

Cited in

(8)

• Optimal path planning based on visibility
• BIFURCATION OF EQUILIBRIUM IN MICROMACHINED ELASTIC STRUCTURES WITH LIQUID INTERFACE
• Control of dynamic microsystems
• Pattern-forming systems for control of large arrays of actuators
• Control of microfluidic systems: two examples, results, and challenges
• Distributed-parameters modeling and control of rod-type solid-state actuators
• BIFURCATION OF EQUILIBRIA IN MICROMACHINED ELASTIC STRUCTURES WITH ELECTROSTATIC ACTUATION
• On the control design and robustness analysis for high-density microcantilever arrays

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