Mathematical model for controlling nonuniformity in reactive ion etching

DOI10.1007/BF02111958MaRDI QIDQ1909168zbMATH OpenOpenAlexFDO

Authors G. A. Chechko, I. V. Medvedev, N. I. Khodakovskij, V. N. Sklepovoj

Publication date 18 March 1996

Published in Journal of Mathematical Sciences (New York) (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/bf02111958

Mathematics Subject Classification ID

PDEs in connection with biology, chemistry and other natural sciences (35Q92) Classical flows, reactions, etc. in chemistry (92E20)

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