Microvia fill process control

DOI10.1080/00207170802366080MaRDI QIDQ3632928zbMATH OpenOpenAlexFDO

Authors R. Tenno, Antti Pohjoranta

Publication date 16 June 2009

Published in International Journal of Control (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1080/00207170802366080

zbMATH Keywords

distributed parameter systemoptimisationprocess control

Mathematics Subject Classification ID

Applications of optimal control and differential games (49N90) Production models (90B30) Classical flows, reactions, etc. in chemistry (92E20)

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