Microvia fill process model and control

DOI10.1007/S10910-014-0320-6MaRDI QIDQ2014816zbMATH OpenOpenAlexFDO

Authors Antti Pohjoranta, R. Tenno

Publication date 16 June 2014

Published in Journal of Mathematical Chemistry (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/s10910-014-0320-6

zbMATH Keywords

deposition controlmicrovia fill controlmicrovia fill modelingmicrovia filling

Mathematics Subject Classification ID

Production models (90B30) Control/observation systems governed by partial differential equations (93C20) Classical flows, reactions, etc. in chemistry (92E20)

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Cites work

• scientific article; zbMATH DE number 51724 (Why is no real title available?)
• scientific article; zbMATH DE number 3322278 (Why is no real title available?)
• A stochastic model for electrodeposition process with applications in filtering and boundary control
• Kolmogorov equations for stochastic PDEs.
• Microvia fill process control
• Stochastic Equations in Infinite Dimensions

Cited in

(1)

• Microvia fill process control

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