Microvia fill process model and control

DOI10.1007/S10910-014-0320-6zbMATH Open1314.90034OpenAlexW2066825946MaRDI QIDQ2014816FDOQ2014816

Authors: Antti Pohjoranta, R. Tenno 

Publication date: 16 June 2014

Published in: Journal of Mathematical Chemistry (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s10910-014-0320-6

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zbMATH Keywords

deposition controlmicrovia fill controlmicrovia fill modelingmicrovia filling

Mathematics Subject Classification ID

Production models (90B30) Control/observation systems governed by partial differential equations (93C20) Classical flows, reactions, etc. in chemistry (92E20)

Cites Work

• Stochastic Equations in Infinite Dimensions
• Title not available (Why is that?)
• Title not available (Why is that?)
• Kolmogorov equations for stochastic PDEs.
• Microvia fill process control
• A stochastic model for electrodeposition process with applications in filtering and boundary control

Cited In (1)

• Microvia fill process control

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