Microvia fill process model and control

DOI10.1007/s10910-014-0320-6zbMath1314.90034OpenAlexW2066825946MaRDI QIDQ2014816

Antti Pohjoranta, R. Tenno

Publication date: 16 June 2014

Published in: Journal of Mathematical Chemistry (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s10910-014-0320-6

zbMATH Keywords

deposition controlmicrovia fill controlmicrovia fill modelingmicrovia filling

Mathematics Subject Classification ID

Control/observation systems governed by partial differential equations (93C20) Production models (90B30) Classical flows, reactions, etc. in chemistry (92E20)

Cites Work

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• Kolmogorov equations for stochastic PDEs.
• Microvia fill process control
• A stochastic model for electrodeposition process with applications in filtering and boundary control
• Stochastic Equations in Infinite Dimensions

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