Modeling and analysis of electrostatic MEMS filters
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Cites work
- scientific article; zbMATH DE number 3703128 (Why is no real title available?)
- A study of the nonlinear response of a resonant microbeam to an electric actuation
- Dynamic pull-in phenomenon in MEMS resonators
- Dynamics of a nonlinear microresonator based on resonantly interacting flexural-torsional modes
Cited in
(9)- A continuum-based modeling of MEMS devices for estimating their resonant frequencies
- Modeling tunable band-pass filters based on RF-MEMS metamaterials
- Mathematical modeling of electrostatic MEMS with tailored dielectric properties
- Dynamics of a nonlinear microresonator based on resonantly interacting flexural-torsional modes
- Effect of geometry on the performance of MEMS aluminum nitride trampoline resonators in longitudinal resonance
- Design of mechanical band-pass filters for energy scavenging: multi-degree-of-freedom models
- Multifidelity modeling and comparative analysis of electrically coupled microbeams under squeeze-film damping effect
- Modeling of the ground plane in electrostatic BEM analysis of MEMS and NEMS
- Dynamics of large oscillations in electrostatic MEMS
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