Modeling and analysis of electrostatic MEMS filters (Q979402)

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Modeling and analysis of electrostatic MEMS filters
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    Modeling and analysis of electrostatic MEMS filters (English)
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    28 June 2010
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    filters
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    modeling
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    nonlinearities
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    resonance
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    discretization
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    capacitance transducers
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    localization
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