Frequency response reduced order model of primary resonance of electrostatically actuated MEMS circular plate resonators (Q2005011)
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scientific article; zbMATH DE number 7257301
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| English | Frequency response reduced order model of primary resonance of electrostatically actuated MEMS circular plate resonators |
scientific article; zbMATH DE number 7257301 |
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Frequency response reduced order model of primary resonance of electrostatically actuated MEMS circular plate resonators (English)
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7 October 2020
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soft AC actuation
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multiple scale method
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damping parameter
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0.86863905
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0.86468273
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