Modelling of the Czochralski flow

DOI10.1155/S1085337598000426MaRDI QIDQ5926217zbMATH OpenOpenAlexFDO

Authors Jan Franců

Publication date 29 September 2002

Published in Abstract and Applied Analysis (Search for Journal in Brave)

Full work available at URL https://eudml.org/doc/49402, http://www.hindawi.com/journals/aaa/volume-3/issue-1-2.html

zbMATH Keywords

convection-diffusion equationcylindrical coordinatesCzochralski flowexistence of weak solutionheat convection-conduction equationsmagnetic field effectNavier-Stokes equationsoxygen impuritysilicon meltsilicon single crystalweak formulation

Mathematics Subject Classification ID

PDEs in connection with fluid mechanics (35Q35) Multiphase and multicomponent flows (76T99) Stefan problems, phase changes, etc. (80A22)

Review text

Summary: The Czochralski method of industrial production of a silicon single crystal consists of pulling up the single cyrstal from the silicon melt. The flow of the melt during the production is called Czochralski flow. The mathematical description of the flow consists of a coupled system of six partial differential equation in cylindrical coordinates containing Navier-Stokes equations (with stream function), heat convection-conduction equations, convection-diffusion equation for oxygen impurity, and an equation describing magnetic field effect. Here, we deal with the analysis of this system in the form used for numerical simulation. A weak formulation is derived, and the existence of weak solution to stationary and evolution problems is proved.

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