Multiscale simulation of nonlinear processes in technical microsystems
Different approaches are used for an investigation of nonlinear gas dynamical processes on macro- micro- and nano-scale levels. An approach combining numerical calculations of gas dynamical equations on the macro level, and a molecular modeling on the micro and nano levels is proposed. Splitting the algorithm on physical processes and scales, grid methods and methods of molecular dynamics characterize this approach. Parameters of supersonic flows of a binary gas mixture in the supersonic cold gas sputtering device are found.
- Analysis, Modeling and Simulation of Multiscale Problems
- Multiscale modeling of microstructured solids
- scientific article; zbMATH DE number 3968208
- scientific article; zbMATH DE number 1998245
- MULTISCALE MODELLING AND COMPUTATION OF MICROSTRUCTURES IN MULTI-WELL PROBLEMS
- Multiphysics and multiscale modeling. Techniques and applications
- Multiscale Analysis of Processes in Complex Media
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