Nanomanufacturing automation

DOI10.1007/978-3-540-78831-7_53MaRDI QIDQ3059928zbMATH OpenOpenAlexFDO

Authors Ning Xi, Xin Lai, Heping Chen

Publication date 30 November 2010

Published in Springer Handbook of Automation (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/978-3-540-78831-7_53

zbMATH Keywords

atomic force microscopy (AFM)local scanning methodnanomanufacturing automation

Mathematics Subject Classification ID

Production models (90B30) Application models in control theory (93C95)

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