Earl R. Lory
From MaRDI portal
Person:1915978
Available identifiers
zbMath Open lory.earl-rMaRDI QIDQ1915978
List of research outcomes
 | This list is not complete and representing at the moment only items from zbMATH Open and arXiv. We are working on additional sources - please check back here soon! |
| Publication | Date of Publication | Type |
|---|---|---|
| Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing | 1996-07-01 | Paper |
Research outcomes over time
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