A. G. Gorobchuk

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List of research outcomes

This list is not complete and representing at the moment only items from zbMATH Open and arXiv. We are working on additional sources - please check back here soon!

PublicationDate of PublicationType
Effect of RF-discharge on silicon etching in CF\(_4/\)O\(_2\)2010-11-12Paper
scientific article; zbMATH DE number 5006153 (Why is no real title available?)2006-02-13Paper
scientific article; zbMATH DE number 2121319 (Why is no real title available?)2004-12-06Paper
scientific article; zbMATH DE number 1431621 (Why is no real title available?)2000-04-13Paper


Research outcomes over time


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