Design of a control system for a macro-micro dual-drive high acceleration high precision positioning stage for IC packaging
From MaRDI portal
Publication:1045439
DOI10.1007/s11431-009-0209-yzbMath1422.70014OpenAlexW2041539629MaRDI QIDQ1045439
Teng Li, Yanjie Liu, Li-Ning Sun
Publication date: 15 December 2009
Published in: Science in China. Series E (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1007/s11431-009-0209-y
Cites Work