Measurement of the thermal transport properties of dielectric thin films using the micro-Raman method

DOI10.1631/JZUS.A0820493MaRDI QIDQ1045558zbMATH OpenFDO

Authors S. Huang, Xiao-Dong Ruan, Xin Fu, Huayong Yang

Publication date 15 December 2009

Published in Journal of Zhejiang University. Science A (Search for Journal in Brave)

zbMATH Keywords

thermal conductivitydielectric thin filmsporous siliconsubmicrometer- or nanometer-scalethermal effect micro-systems (TEMS)

Mathematics Subject Classification ID

Lasers, masers, optical bistability, nonlinear optics (78A60) Experimental work for problems pertaining to classical thermodynamics (80-05)

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• An overview of advances in heat conduction models and approaches for prediction of thermal conductivity in thin dielectric films
• Thermal conductance measurement on vacuum glazing
• Analysis of the 3-omega method for thermal conductivity measurement
• Microscale Thermal Energy Transfer Over a Combined System of Thin Films: Analytical Approach

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