Mechanics of compressive stress evolution during thin film growth
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Publication:1434569
DOI10.1016/j.jmps.2003.09.013zbMath1041.74526OpenAlexW2066920989MaRDI QIDQ1434569
E. Chason, Lambert B. Freund, Pradeep R. Guduru
Publication date: 12 July 2004
Published in: Journal of the Mechanics and Physics of Solids (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.jmps.2003.09.013
Related Items (2)
Recoverable creep deformation and transient local stress concentration due to heterogeneous grain-boundary diffusion and sliding in polycrystalline solids ⋮ Numerical simulations of stress generation and evolution in Volmer-Weber thin films
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