An algorithm for smoothing three-dimensional Monte Carlo ion implantation simulation results

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Publication:1826596

DOI10.1016/J.MATCOM.2003.11.010zbMATH Open1106.82325OpenAlexW2115840187WikidataQ62600367 ScholiaQ62600367MaRDI QIDQ1826596FDOQ1826596

Clemens Heitzinger, Siegfried Selberherr, A. Hössinger

Publication date: 6 August 2004

Published in: Mathematics and Computers in Simulation (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.matcom.2003.11.010




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