On the determination of dopant-concentration profiles by grazing emission X-ray fluorescence spectroscopy using the maximum-entropy method

DOI10.1023/A:1020324522086zbMATH Open1010.78002OpenAlexW1501417929MaRDI QIDQ1861663FDOQ1861663

Authors: S. M. P. Smolders, H. P. Urbach 

Publication date: 10 March 2003

Published in: Journal of Engineering Mathematics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1023/a:1020324522086

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zbMATH Keywords

maximum entropysemiconductorsinverse Laplace transformspectroscopyX-ray fluorescence

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Statistical mechanics of semiconductors (82D37) Physical optics (78A10)

Cited In (3)

• x-ray attenuation factors in fluorescence intensity emission -- effects of finite sample size
• Title not available (Why is that?)
• An X-ray fluorescence depth distribution function for electron beam microanalysis

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