On the determination of dopant-concentration profiles by grazing emission X-ray fluorescence spectroscopy using the maximum-entropy method

DOI10.1023/A:1020324522086MaRDI QIDQ1861663zbMATH OpenOpenAlexFDO

Authors S. M. P. Smolders, H. P. Urbach

Publication date 10 March 2003

Published in Journal of Engineering Mathematics (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1023/a:1020324522086

zbMATH Keywords

maximum entropysemiconductorsinverse Laplace transformspectroscopyX-ray fluorescence

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Statistical mechanics of semiconductors (82D37) Physical optics (78A10)

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