On the determination of dopant-concentration profiles by grazing emission X-ray fluorescence spectroscopy using the maximum-entropy method

DOI10.1023/A:1020324522086zbMath1010.78002MaRDI QIDQ1861663

S. M. P. Smolders, H. P. Urbach

Publication date: 10 March 2003

Published in: Journal of Engineering Mathematics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1023/a:1020324522086

zbMATH Keywords

inverse Laplace transform; maximum entropy; semiconductors; spectroscopy; X-ray fluorescence

Mathematics Subject Classification ID

82D37: Statistical mechanics of semiconductors

78A55: Technical applications of optics and electromagnetic theory

78A10: Physical optics