Using liquid chemical etching to manufacture technological structures of minimum size

DOI10.1007/BF01259480MaRDI QIDQ1909059zbMATH OpenFDO

Authors I. V. Medvedev, N. I. Khodakovskij, V. A. Sherstyuk, G. A. Chechko, V. N. Sklepovoj

Publication date 17 March 1996

Published in Journal of Mathematical Sciences (New York) (Search for Journal in Brave)

zbMATH Keywords

electric fieldetching liquidmanufacturing \(LSI\) components

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Classical flows, reactions, etc. in chemistry (92E20)

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