Using liquid chemical etching to manufacture technological structures of minimum size

DOI10.1007/BF01259480zbMATH Open0850.92050MaRDI QIDQ1909059FDOQ1909059

Authors: I. V. Medvedev, N. I. Khodakovskij, V. A. Sherstyuk, G. A. Chechko, V. N. Sklepovoj 

Publication date: 17 March 1996

Published in: Journal of Mathematical Sciences (New York) (Search for Journal in Brave)

zbMATH Keywords

electric fieldetching liquidmanufacturing \(LSI\) components

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Classical flows, reactions, etc. in chemistry (92E20)

Cites Work

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