Using liquid chemical etching to manufacture technological structures of minimum size (Q1909059)
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scientific article; zbMATH DE number 853892
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| default for all languages | No label defined |
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| English | Using liquid chemical etching to manufacture technological structures of minimum size |
scientific article; zbMATH DE number 853892 |
Statements
Using liquid chemical etching to manufacture technological structures of minimum size (English)
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17 March 1996
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electric field
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etching liquid
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manufacturing \(LSI\) components
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