Beyond pull-in angle control of a dual axis torsional micro-actuator considering bending effects

DOI10.1016/J.APM.2022.02.016MaRDI QIDQ2109519zbMATH OpenOpenAlexFDO

Authors Mozhde Khadembashi, Hamid Moeenfard

Publication date 21 December 2022

Published in Applied Mathematical Modelling (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.apm.2022.02.016

zbMATH Keywords

angle controlbending effectbeyond pull-in stabilizationdual axis torsional micro-actuatorsincremental fuzzy controller

Mathematics Subject Classification ID

Control, switches and devices (``smart materials) in solid mechanics (74M05)

Cites work

• A family of embedded Runge-Kutta formulae
• Bounds to the pull-in voltage of a MEMS/NEMS beam with surface elasticity
• Dynamic characteristic analysis of an electrostatically-actuated circular nanoplate subject to surface effects
• scientific article; zbMATH DE number 909506 (Why is no real title available?)
• scientific article; zbMATH DE number 3388490 (Why is no real title available?)
• scientific article; zbMATH DE number 3186598 (Why is no real title available?)
• Matlab
• Modeling squeezed film air damping in torsional micromirrors using extended Kantorovich method
• Nonlinear analysis of thermoelastic damping in axisymmetric vibration of micro circular thin-plate resonators
• ode23s
• Size effect on pull-in behavior of electrostatically actuated microbeams based on a modified couple stress theory
• Size-dependent dynamic pull-in analysis of beam-type MEMS under mechanical shock based on the modified couple stress theory
• Static pull-in analysis of electrostatically actuated microbeams using homotopy perturbation method
• Study of parametric oscillation of an electrostatically actuated microbeam using variational iteration method
• The MATLAB ODE Suite
• Thermal and surface effects on the pull-in characteristics of circular nanoplate NEMS actuator based on nonlocal elasticity theory

Cited in

(3)

• A coupled bending-torsion model for electrostatically actuated torsional nano/micro-actuators with considering influence of van der Waals force
• A helical actuator driven by biased SMA: design, model, and experiment
• Electrothermomechanical and torsion-bending-stretching coupling micromirrors: numerical and analytical modeling, parametric analysis and experimental characterization method

Describes a project that uses

Uses Software

• ode23s
• Matlab
• ode23
• Ode15s
• MATLAB ODE suite
• ode113
• ode45

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