Beyond pull-in angle control of a dual axis torsional micro-actuator considering bending effects

DOI10.1016/j.apm.2022.02.016zbMath1503.74087OpenAlexW4213377241MaRDI QIDQ2109519

Mozhde Khadembashi, Hamid Moeenfard

Publication date: 21 December 2022

Published in: Applied Mathematical Modelling (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.apm.2022.02.016

zbMATH Keywords

bending effectangle controlbeyond pull-in stabilizationdual axis torsional micro-actuatorsincremental fuzzy controller

Mathematics Subject Classification ID

Control, switches and devices (``smart materials) in solid mechanics (74M05)

Uses Software

• Matlab
• ode23
• ode45
• Ode15s
• ode113
• ode23s
• MATLAB ODE suite

Cites Work

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• Matlab
• ode23s
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• A family of embedded Runge-Kutta formulae
• Size effect on pull-in behavior of electrostatically actuated microbeams based on a modified couple stress theory
• Bounds to the pull-in voltage of a MEMS/NEMS beam with surface elasticity
• Thermal and surface effects on the pull-in characteristics of circular nanoplate NEMS actuator based on nonlocal elasticity theory
• Dynamic characteristic analysis of an electrostatically-actuated circular nanoplate subject to surface effects
• Size-dependent dynamic pull-in analysis of beam-type MEMS under mechanical shock based on the modified couple stress theory
• Study of parametric oscillation of an electrostatically actuated microbeam using variational iteration method
• The MATLAB ODE Suite

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