Topology optimization of MEMS resonators with target eigenfrequencies and modes

DOI10.1016/J.EUROMECHSOL.2021.104352OpenAlexW3184864577MaRDI QIDQ2236299FDOQ2236299

Authors: Daniele Giannini, Niels Aage, Francesco Braghin 

Publication date: 22 October 2021

Published in: European Journal of Mechanics. A. Solids (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.euromechsol.2021.104352

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zbMATH Keywords

reduced-order modelmethod of moving asymptotesminimum length scaleMindlin shell finite elementfirst structural vibration mode

Mathematics Subject Classification ID

Vibrations in dynamical problems in solid mechanics (74H45) Finite element methods applied to problems in solid mechanics (74S05) Topological methods for optimization problems in solid mechanics (74P15) Numerical and other methods in solid mechanics (74S99)

Cites Work

• Material interpolation schemes in topology optimization
• Title not available (Why is that?)
• Static and vibrational shape and topology optimization using homogenization and mathematical programming
• The method of moving asymptotes—a new method for structural optimization
• On projection methods, convergence and robust formulations in topology optimization
• Elements of structural optimization.
• Topological design for vibrating structures
• Minimum length scale in topology optimization by geometric constraints
• Topology optimization of a cantilevered piezoelectric energy harvester using stress norm constraints
• Topology optimization in micromechanical resonator design
• Solutions to shape and topology eigenvalue optimization problems using a homogenization method
• Topology optimization of resonating structures using SIMP method
• Size optimization of MEMS gyroscopes using substructuring
• A nonlinear reduced order model with parametrized shape defects

Cited In (8)

• Design methodology of magnetic fields and structures for magneto-mechanical resonator based on topology optimization
• Polygonal composite elements for stress-constrained topology optimization of nearly incompressible materials
• Systematic design of high-\(Q\) prestressed micro membrane resonators
• Size optimization of MEMS gyroscopes using substructuring
• An efficient transient dynamic topology optimization framework based on successive iteration of analysis and design
• Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives
• Maximization of the fundamental eigenfrequency of micropolar solids through topology optimization
• Topology optimization in micromechanical resonator design

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