Shock response of electrostatically coupled microbeams under the squeeze-film damping effect
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Publication:2296321
Finite element, Rayleigh-Ritz and Galerkin methods for initial value and initial-boundary value problems involving PDEs (65M60) Electromagnetic effects in solid mechanics (74F15) Rods (beams, columns, shafts, arches, rings, etc.) (74K10) Micromechanics of solids (74M25) Numerical approximation of solutions of dynamical problems in solid mechanics (74H15)
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Cites work
Cited in
(7)- Dynamical characteristics of an electrically actuated microbeam under the effects of squeeze-film and thermoelastic damping
- Hybrid elements for modelling squeeze film effects coupled with structural interactions in vibratory MEMS devices
- Fluid sensing using microcantilevers: from physics-based modeling to deep learning
- Mechanics of energy transfer and failure of ductile microscale beams subjected to dynamic loading
- Multifidelity modeling and comparative analysis of electrically coupled microbeams under squeeze-film damping effect
- Shock response of electrostatically coupled microbeams under the squeeze-film damping effect
- Performance of multifunctional piezoelectric energy harvesting microgyroscopes with material degradation
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