Hybrid elements for modelling squeeze film effects coupled with structural interactions in vibratory MEMS devices

DOI10.3970/CMES.2014.103.091MaRDI QIDQ2965052zbMATH OpenOpenAlexFDO

Authors

Publication date 27 February 2017

Full work available at URL http://eprints.iisc.ac.in/51410/

zbMATH Keywords

FEMhybridsqueeze filmcoupled

Mathematics Subject Classification ID

Finite element, Rayleigh-Ritz and Galerkin methods for initial value and initial-boundary value problems involving PDEs (65M60) Fluid-solid interactions (including aero- and hydro-elasticity, porosity, etc.) (74F10) Finite element methods applied to problems in solid mechanics (74S05) Finite element methods applied to problems in fluid mechanics (76M10) Thin fluid films (76A20)

Recommendations

• A hybrid finite element strategy for the simulation of MEMS structures
• Multifidelity modeling and comparative analysis of electrically coupled microbeams under squeeze-film damping effect
• Shock response of electrostatically coupled microbeams under the squeeze-film damping effect
• A wavelet interpolation Galerkin method for the simulation of MEMS devices under the effect of squeeze film damping
• A continuum-based modeling of MEMS devices for estimating their resonant frequencies

Cited in

(3)

• A monolithic, finite element-based strategy for solving fluid structure interaction problems coupled with electrostatics
• Periodic oscillations in MEMS under squeeze film damping force
• Hellinger-Reissner principle based stress-displacement formulation for three-dimensional isogeometric analysis in linear elasticity

This page was built for publication: Hybrid elements for modelling squeeze film effects coupled with structural interactions in vibratory MEMS devices

Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q2965052)