Hybrid Elements for Modelling Squeeze Film Effects Coupled with Structural Interactions in Vibratory MEMS Devices

DOI10.3970/CMES.2014.103.091zbMath1356.74213OpenAlexW1517397106MaRDI QIDQ2965052

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Publication date: 27 February 2017

Full work available at URL: http://eprints.iisc.ac.in/51410/

zbMATH Keywords

FEMhybridsqueeze filmcoupled

Mathematics Subject Classification ID

Fluid-solid interactions (including aero- and hydro-elasticity, porosity, etc.) (74F10) Finite element methods applied to problems in solid mechanics (74S05) Thin fluid films (76A20) Finite element methods applied to problems in fluid mechanics (76M10) Finite element, Rayleigh-Ritz and Galerkin methods for initial value and initial-boundary value problems involving PDEs (65M60)

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