A wavelet interpolation Galerkin method for the simulation of MEMS devices under the effect of squeeze film damping

DOI10.1155/2010/586718MaRDI QIDQ966366zbMATH OpenOpenAlexWikidataFDO

Authors Pu Li, Yuming Fang

Publication date 23 April 2010

Published in Mathematical Problems in Engineering (Search for Journal in Brave)

Full work available at URL https://eudml.org/doc/224505

Mathematics Subject Classification ID

Numerical methods for wavelets (65T60) Finite element methods applied to problems in fluid mechanics (76M10)

Review text

Summary: This paper presents a new wavelet interpolation Galerkin method for the numerical simulation of MEMS devices under the effect of squeeze film damping. Both trial and weight functions are a class of interpolating functions generated by autocorrelation of the usual compactly supported Daubechies scaling functions. To the best of our knowledge, this is the first time that wavelets have been used as basis functions for solving the PDEs of MEMS devices. As opposed to the previous wavelet-based methods that are all limited in one energy domain, the MEMS devices in the paper involve two coupled energy domains. Two typical electrically actuated micro devices with squeeze film damping effect are examined respectively to illustrate the new wavelet interpolation Galerkin method. Simulation results show that the results of the wavelet interpolation Galerkin method match the experimental data better than that of the finite difference method by about 10\%.

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Cites work

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Cited in

(2)

• Deconvolution of defocused image with multivariate local polynomial regression and iterative Wiener filtering in DWT domain
• Hybrid elements for modelling squeeze film effects coupled with structural interactions in vibratory MEMS devices

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