Domain decomposition method for Maxwell's equations: scattering off periodic structures

DOI10.1016/j.jcp.2007.04.017zbMath1310.78009arXivmath/0602179OpenAlexW2133933502MaRDI QIDQ2456699

Yanyan Li

Publication date: 19 October 2007

Published in: Journal of Computational Physics (Search for Journal in Brave)

Full work available at URL: https://arxiv.org/abs/math/0602179

zbMATH Keywords

finite elementsdomain decompositionMaxwell's equationsconical diffractionlithographyperfectly matched layer methodelectro-magnetic scatteringEUV

Mathematics Subject Classification ID

Multigrid methods; domain decomposition for boundary value problems involving PDEs (65N55) Finite element, Rayleigh-Ritz and Galerkin methods for boundary value problems involving PDEs (65N30) Diffraction, scattering (78A45) Finite element, Galerkin and related methods applied to problems in optics and electromagnetic theory (78M10)

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Uses Software

• PARDISO
• JCMmode

Cites Work

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