Domain decomposition method for Maxwell's equations: scattering off periodic structures

DOI10.1016/J.JCP.2007.04.017MaRDI QIDQ2456699zbMATH OpenOpenAlexFDO

Authors Yanyan Li

Publication date 19 October 2007

Published in Journal of Computational Physics (Search for Journal in Brave)

Full work available at URL https://arxiv.org/abs/math/0602179

zbMATH Keywords

conical diffractiondomain decompositionelectro-magnetic scatteringEUVfinite elementslithographyMaxwell's equationsperfectly matched layer method

Mathematics Subject Classification ID

Finite element, Rayleigh-Ritz and Galerkin methods for boundary value problems involving PDEs (65N30) Multigrid methods; domain decomposition for boundary value problems involving PDEs (65N55) Diffraction, scattering (78A45) Finite element, Galerkin and related methods applied to problems in optics and electromagnetic theory (78M10)

Abstract: We present a domain decomposition approach for the computation of the electromagnetic field within periodic structures. We use a Schwarz method with transparent boundary conditions at the interfaces of the domains. Transparent boundary conditions are approximated by the perfectly matched layer method (PML). To cope with Wood anomalies appearing in periodic structures an adaptive strategy to determine optimal PML parameters is developed. We focus on the application to typical EUV lithography line masks. Light propagation within the multi-layer stack of the EUV mask is treated analytically. This results in a drastic reduction of the computational costs and allows for the simulation of next generation lithography masks on a standard personal computer.

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Cited in

(15)

• Parallelized characteristic basis finite element method (CBFEM-MPI)-a non-iterative domain decomposition algorithm for electromagnetic scattering problems
• Sweeping preconditioners for the iterative solution of quasiperiodic Helmholtz transmission problems in layered media
• An improved sweeping domain decomposition preconditioner for the Helmholtz equation
• Hardy space infinite elements for Helmholtz-type problems with unbounded inhomogeneities
• A combined three-dimensional finite element and scattering matrix method for the analysis of plane wave diffraction by bi-periodic, multilayered structures
• Efficient solution of Maxwell's equations for geometries with repeating patterns by an exchange of discretization directions in the aperiodic Fourier modal method
• A high-order perturbation of surfaces (HOPS) approach to Fokas integral equations: vector electromagnetic scattering by periodic crossed gratings
• A two-level domain decomposition method with accurate interface conditions for the Helmholtz problem
• A rapidly converging domain decomposition method for the Helmholtz equation
• A class of iterative solvers for the Helmholtz equation: factorizations, sweeping preconditioners, source transfer, single layer potentials, polarized traces, and optimized Schwarz methods
• Functional Analysis for Helmholtz Equation in the Framework of Domain Decomposition
• A Domain Decomposition Method for the Solution of Large Electromagnetic Scattering Problems
• Domain decomposition for quasi-periodic scattering by layered media via robust boundary-integral equations at all frequencies
• A FEM Domain Decomposition Method for Photonic and Electromagnetic Band Gap Structures
• Schwarz methods by domain truncation

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