Domain decomposition method for Maxwell's equations: scattering off periodic structures (Q2456699)
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scientific article; zbMATH DE number 5202148
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| default for all languages | No label defined |
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| English | Domain decomposition method for Maxwell's equations: scattering off periodic structures |
scientific article; zbMATH DE number 5202148 |
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Domain decomposition method for Maxwell's equations: scattering off periodic structures (English)
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19 October 2007
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domain decomposition
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conical diffraction
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electro-magnetic scattering
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Maxwell's equations
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lithography
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EUV
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finite elements
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perfectly matched layer method
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0.92733175
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0.9132433
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0.91137254
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0.9060033
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0.8974215
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