Domain decomposition method for Maxwell's equations: scattering off periodic structures (Q2456699)

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Domain decomposition method for Maxwell's equations: scattering off periodic structures
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    Domain decomposition method for Maxwell's equations: scattering off periodic structures (English)
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    19 October 2007
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    domain decomposition
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    conical diffraction
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    electro-magnetic scattering
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    Maxwell's equations
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    lithography
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    EUV
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    finite elements
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    perfectly matched layer method
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