An analysis of the membrane deflection experiment used in the investigation of mechanical properties of freestanding submicron thin films

DOI10.1016/J.IJSOLSTR.2005.07.052MaRDI QIDQ2459883zbMATH OpenOpenAlexFDO

Authors Yanyan Li

Publication date 8 November 2007

Published in International Journal of Solids and Structures (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.ijsolstr.2005.07.052

zbMATH Keywords

fractureMEMS materialsnanoscale testingplasticityThin films

Mathematics Subject Classification ID

Experimental work for problems pertaining to mechanics of deformable solids (74-05) Membranes (74K15) Thin films (74K35)

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