Correlation of errors in inverse problems of optical coatings monitoring

DOI10.1515/JIIP-2020-0079MaRDI QIDQ2660799zbMATH OpenOpenAlexFDO

Authors S. A. Sharapova, A. V. Tikhonravov, Igor V. Kochikov, A. G. Yagola

Publication date 31 March 2021

Published in Journal of Inverse and Ill-posed Problems (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1515/jiip-2020-0079

zbMATH Keywords

electrodynamicserror correlationidentification problemsinverse problemsoptical coatingsoptical monitoring

Mathematics Subject Classification ID

Inverse problems (including inverse scattering) in optics and electromagnetic theory (78A46) System identification (93B30)

Recommendations

• Inverse problem of determining the thickness of optical coatings layers from the data of monochromatic control
• Mathematical investigation of the error self-compensation mechanism in optical coating technology
• Comparative analysis of algorithms for solving inverse problems related to monochromatic monitoring the deposition of multilayer optical coatings
• Computational approach to the investigation of the error self-compensation effect in the deposition of multilayer optical coatings
• Stable method for optical monitoring the deposition of multilayer optical coatings

Cites work

• Mathematical investigation of the error self-compensation mechanism in optical coating technology

Cited in

(8)

• Integral characteristic method in the inverse problem of optical coating design
• Computational approach to the investigation of the error self-compensation effect in the deposition of multilayer optical coatings
• Comparative analysis of algorithms for solving inverse problems related to monochromatic monitoring the deposition of multilayer optical coatings
• Inverse problem of determining the thickness of optical coatings layers from the data of monochromatic control
• Mathematical investigation of the error self-compensation mechanism in optical coating technology
• Inverse problems of optics of layered media
• Investigation of optical coating properties based on a simplified deposition process simulator
• Stable method for optical monitoring the deposition of multilayer optical coatings

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