Stable method for optical monitoring the deposition of multilayer optical coatings

DOI10.1134/S0965542520120064MaRDI QIDQ828142zbMATH OpenOpenAlexFDO

Authors Yu. S. Lagutin, A. A. Lagutina, A. V. Tikhonravov, Igor V. Kochikov, D. V. Lukyanenko, A. G. Yagola

Publication date 8 January 2021

Published in Computational Mathematics and Mathematical Physics (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1134/s0965542520120064

zbMATH Keywords

analysis of experimental datamonochromatic optical monitoringmultilayer coatingsnumerical algorithms

Mathematics Subject Classification ID

Experimental work for problems pertaining to optics and electromagnetic theory (78-05) Technical applications of optics and electromagnetic theory (78A55) Basic methods for problems in optics and electromagnetic theory (78M99)

Recommendations

• Comparison of algorithms for determining the thickness of optical coatings online
• Computational approach to the investigation of the error self-compensation effect in the deposition of multilayer optical coatings
• Comparative analysis of algorithms for solving inverse problems related to monochromatic monitoring the deposition of multilayer optical coatings
• Inverse problem of determining the thickness of optical coatings layers from the data of monochromatic control
• Correlation of errors in inverse problems of optical coatings monitoring

Cites work

• Raising the accuracy of monitoring the optical coating deposition by application of a nonlocal algorithm of data analysis

Cited in

(7)

• Computational approach to the investigation of the error self-compensation effect in the deposition of multilayer optical coatings
• Comparative analysis of algorithms for solving inverse problems related to monochromatic monitoring the deposition of multilayer optical coatings
• Comparison of algorithms for determining the thickness of optical coatings online
• Development of optical naphthalene sublimation method
• Correlation of errors in inverse problems of optical coatings monitoring
• Raising the accuracy of monitoring the optical coating deposition by application of a nonlocal algorithm of data analysis
• Inverse problems of optics of layered media

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