Stable method for optical monitoring the deposition of multilayer optical coatings

DOI10.1134/S0965542520120064zbMATH Open1455.78013OpenAlexW3120532818MaRDI QIDQ828142FDOQ828142

A. A. Lagutina, Igor V. Kochikov, A. G. Yagola, A. V. Tikhonravov, D. V. Lukyanenko, Yu. S. Lagutin

Publication date: 8 January 2021

Published in: Computational Mathematics and Mathematical Physics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1134/s0965542520120064

Recommendations

• Comparison of algorithms for determining the thickness of optical coatings online
• Computational approach to the investigation of the error self-compensation effect in the deposition of multilayer optical coatings
• Comparative analysis of algorithms for solving inverse problems related to monochromatic monitoring the deposition of multilayer optical coatings
• Inverse problem of determining the thickness of optical coatings layers from the data of monochromatic control
• Correlation of errors in inverse problems of optical coatings monitoring

zbMATH Keywords

numerical algorithmsanalysis of experimental datamonochromatic optical monitoringmultilayer coatings

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Experimental work for problems pertaining to optics and electromagnetic theory (78-05) Basic methods for problems in optics and electromagnetic theory (78M99)

Cites Work

• Raising the accuracy of monitoring the optical coating deposition by application of a nonlocal algorithm of data analysis

Cited In (2)

• Comparative analysis of algorithms for solving inverse problems related to monochromatic monitoring the deposition of multilayer optical coatings
• Development of optical naphthalene sublimation method

This page was built for publication: Stable method for optical monitoring the deposition of multilayer optical coatings

Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q828142)