Determination of the conductance and thickness of semiconductor wafers and nanometer layers with the use of one-dimensional microwave photonic crystals

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Publication:2840189

DOI10.1134/S1028335813010023zbMATH Open1274.82084OpenAlexW2083053948WikidataQ57670812 ScholiaQ57670812MaRDI QIDQ2840189FDOQ2840189


Authors: S. A. Nikitov, Yu. V. Gulyaev, D. A. Usanov, A. V. Skripal', D. V. Ponomarev Edit this on Wikidata


Publication date: 17 July 2013

Published in: Doklady Akademii Nauk (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1134/s1028335813010023




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