Determination of the conductance and thickness of semiconductor wafers and nanometer layers with the use of one-dimensional microwave photonic crystals (Q2840189)
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scientific article; zbMATH DE number 6188943
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| English | Determination of the conductance and thickness of semiconductor wafers and nanometer layers with the use of one-dimensional microwave photonic crystals |
scientific article; zbMATH DE number 6188943 |
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Determination of the conductance and thickness of semiconductor wafers and nanometer layers with the use of one-dimensional microwave photonic crystals (English)
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17 July 2013
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multilayer photonic crystal
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semiconductors
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wave parameters
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A matrix of wave transmission is used to calculate the reflection and transmission coefficients of the electromagnetic radiation at the interaction with the photonic crystal. Multilayer one-dimensional photonic crystals are studied. Least square methods are used to exclude the ambiguity in the solution of the inverse problem. Applicability limits are investigated.
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0.7068092823028564
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0.6867631673812866
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0.6833287477493286
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0.6805616617202759
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0.6792357563972473
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