Dynamics of electrostatic microelectromechanical systems actuators

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Publication:2861712


DOI10.1063/1.3684748zbMath1274.74050arXiv1201.5439MaRDI QIDQ2861712

Yisong Yang, Le Zhao, Rui-feng Zhang

Publication date: 11 November 2013

Published in: Journal of Mathematical Physics (Search for Journal in Brave)

Full work available at URL: https://arxiv.org/abs/1201.5439


74H10: Analytic approximation of solutions (perturbation methods, asymptotic methods, series, etc.) of dynamical problems in solid mechanics

74F15: Electromagnetic effects in solid mechanics

74A60: Micromechanical theories

78A55: Technical applications of optics and electromagnetic theory

78A30: Electro- and magnetostatics

74S60: Stochastic and other probabilistic methods applied to problems in solid mechanics


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