A version of the particle-in-cell method with adaptive mass alteration for the silane plasma simulation

zbMATH Open1249.78041MaRDI QIDQ2883006FDOQ2883006

Authors: Alexey V. Snytnikov, Vitalij A. Vshivkov, W. J. Goedheer 

Publication date: 11 May 2012

Published in: Joint Bulletin of the Novosibirsk Computing Center (NCC) and A. P. Ershov Institute of Informatics Systems (IIS). Series: Computer Science (Search for Journal in Brave)

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zbMATH Keywords

electric fieldparticle-in-cell simulationrecombination of ions

Mathematics Subject Classification ID

Particle methods and lattice-gas methods (76M28) Motion of charged particles (78A35)

Cited In (4)

• Adaptive mass alteration to model ion-ion recombination in a particle-in-cell simulation of silane radio-frequency discharges
• Title not available (Why is that?)
• The surface charging effects in three-dimensional simulation of the profiles of plasma-etched nanostructures
• Particle-in-cell method with adaptive mass

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