A general procedure for thermomechanical calibration of nano/micro-mechanical resonators

DOI10.1016/J.AOP.2013.08.003MaRDI QIDQ306895zbMATH OpenOpenAlexFDO

Authors B. D. Hauer, C. Doolin, K. S. D. Beach, J. P. Davis

Publication date 1 September 2016

Published in Annals of Physics (Search for Journal in Brave)

Full work available at URL https://arxiv.org/abs/1305.0557

zbMATH Keywords

MEMSclassical resonatordamped Brownian motionNEMSthermomechanical calibration

Mathematics Subject Classification ID

Micromechanical theories (74A60) Thermal effects in solid mechanics (74F05) Micromechanics of solids (74M25)

Abstract: We provide a detailed description of a general procedure by which a nano/micro-mechanical resonator can be calibrated using its thermal motion. A brief introduction to the equations of motion for such a resonator is presented, followed by a detailed derivation of the corresponding power spectral density (PSD) function. The effective masses for a number of different resonator geometries are determined using both finite element method (FEM) modeling and analytical calculations.

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Cites work

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Cited in

(4)

• Absorbance and optical responsivity of two-dimensional mechanical resonators at oblique incidence
• Simultaneous determination of position and mass of a particle by the vibration of a diaphragm-based nanomechanical resonator
• Nanosecond-pulse-controlled higher-order sideband comb in a GaAs optomechanical disk resonator in the non-perturbative regime
• Nonlinear power spectral densities for the harmonic oscillator

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