A general procedure for thermomechanical calibration of nano/micro-mechanical resonators

DOI10.1016/J.AOP.2013.08.003zbMATH Open1343.74038arXiv1305.0557OpenAlexW3100473366MaRDI QIDQ306895FDOQ306895

Authors: B. D. Hauer, C. Doolin, K. S. D. Beach, J. P. Davis 

Publication date: 1 September 2016

Published in: Annals of Physics (Search for Journal in Brave)

Abstract: We provide a detailed description of a general procedure by which a nano/micro-mechanical resonator can be calibrated using its thermal motion. A brief introduction to the equations of motion for such a resonator is presented, followed by a detailed derivation of the corresponding power spectral density (PSD) function. The effective masses for a number of different resonator geometries are determined using both finite element method (FEM) modeling and analytical calculations.

Full work available at URL: https://arxiv.org/abs/1305.0557

Recommendations

• Thermoelastic damping in micromechanical resonators operating as mass sensors
• Simultaneous determination of position and mass of a particle by the vibration of a diaphragm-based nanomechanical resonator
• Stress-dependent thermal relaxation effects in micro-mechanical resonators
• Thermoelastic damping effect analysis in micro flexural resonator of atomic force microscopy
• Analysis of thermoelastic damping in micro- and nanomechanical resonators based on dual-phase-lagging generalized thermoelasticity theory

zbMATH Keywords

MEMSclassical resonatordamped Brownian motionNEMSthermomechanical calibration

Mathematics Subject Classification ID

Micromechanical theories (74A60) Thermal effects in solid mechanics (74F05) Micromechanics of solids (74M25)

Cites Work

• Table of integrals, series, and products. Translated from the Russian. Translation edited and with a preface by Alan Jeffrey and Daniel Zwillinger. With one CD-ROM (Windows, Macintosh and UNIX)
• Numerical recipes. The art of scientific computing.
• Title not available (Why is that?)

Cited In (4)

• Absorbance and optical responsivity of two-dimensional mechanical resonators at oblique incidence
• Simultaneous determination of position and mass of a particle by the vibration of a diaphragm-based nanomechanical resonator
• Nanosecond-pulse-controlled higher-order sideband comb in a GaAs optomechanical disk resonator in the non-perturbative regime
• Nonlinear power spectral densities for the harmonic oscillator

This page was built for publication: A general procedure for thermomechanical calibration of nano/micro-mechanical resonators

Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q306895)