A general procedure for thermomechanical calibration of nano/micro-mechanical resonators (Q306895)
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scientific article; zbMATH DE number 6621345
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| English | A general procedure for thermomechanical calibration of nano/micro-mechanical resonators |
scientific article; zbMATH DE number 6621345 |
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A general procedure for thermomechanical calibration of nano/micro-mechanical resonators (English)
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1 September 2016
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thermomechanical calibration
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MEMS
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NEMS
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classical resonator
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damped Brownian motion
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0.7116220593452454
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0.6825173497200012
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0.6770942807197571
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0.6767612099647522
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