Studying thin film damping in a micro-beam resonator based on non-classical theories

DOI10.1007/S10409-015-0482-XMaRDI QIDQ332867zbMATH OpenOpenAlexWikidataFDO

Authors Mina Ghanbari, Siamak Hossainpour, Ghader Rezazadeh

Publication date 9 November 2016

Published in Acta Mechanica Sinica (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/s10409-015-0482-x

zbMATH Keywords

micro-electromechanical systems (MEMS)micro-polar theorythin film damping

Mathematics Subject Classification ID

Electromagnetic effects in solid mechanics (74F15) Rods (beams, columns, shafts, arches, rings, etc.) (74K10) Thin films (74K35) Micromechanics of solids (74M25)

Recommendations

• Thermoelastic damping in microbeam resonators based on modified strain gradient elasticity and generalized thermoelasticity theories
• Thermoelastic vibrations of a Timoshenko microbeam based on the modified couple stress theory
• Thermoelastic damping in a micro-beam resonator using modified couple stress theory
• Size-dependent damping of a nanobeam using nonlocal thermoelasticity: extension of Zener, Lifshitz, and Roukes' damping model
• Viscous fluid damping in a laterally oscillating finger of a comb-drive micro-resonator based on micro-polar fluid theory

Cites work

• Bifurcation analysis of a capacitive micro-resonator considering non-local elasticity theory
• Effects of axial and residual stresses on thermoelastic damping in capacitive micro-beam resonators
• Investigation of the size effects in Timoshenko beams based on the couple stress theory
• Linear theory of nonlocal elasticity and dispersion of plane waves
• Microchannels flow modelling with the micropolar fluid theory
• Self-similar solution of incompressible micropolar boundary layer flow over a semi-infinite plate
• The MEMS handbook
• The Squeezing of a Fluid Between Two Plates
• The size-dependent natural frequency of Bernoulli-Euler micro-beams
• Theory of thermomicrofluids

Cited in

(4)

• Nonlinear dynamics of a tunable novel accelerometer, tunable with a microtriple electrode variable capacitor
• Forced oscillations and stability analysis of a nonlinear micro-rotating shaft incorporating a non-classical theory
• Anharmonic 1D actuator model including electrostatic and Casimir forces with fractional damping perturbed by an external force
• Energy dissipation in microfluidic beam resonators

This page was built for publication: Studying thin film damping in a micro-beam resonator based on non-classical theories

Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q332867)