Studying thin film damping in a micro-beam resonator based on non-classical theories

DOI10.1007/s10409-015-0482-xzbMath1348.74233OpenAlexW1425770349WikidataQ58483175 ScholiaQ58483175MaRDI QIDQ332867

Siamak Hossainpour, Ghader Rezazadeh, Mina Ghanbari

Publication date: 9 November 2016

Published in: Acta Mechanica Sinica (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s10409-015-0482-x

zbMATH Keywords

micro-electromechanical systems (MEMS)micro-polar theorythin film damping

Mathematics Subject Classification ID

Rods (beams, columns, shafts, arches, rings, etc.) (74K10) Micromechanics of solids (74M25) Electromagnetic effects in solid mechanics (74F15) Thin films (74K35)

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