Studying thin film damping in a micro-beam resonator based on non-classical theories

DOI10.1007/S10409-015-0482-XzbMATH Open1348.74233OpenAlexW1425770349WikidataQ58483175 ScholiaQ58483175MaRDI QIDQ332867FDOQ332867

Authors: Mina Ghanbari, Siamak Hossainpour, Ghader Rezazadeh 

Publication date: 9 November 2016

Published in: Acta Mechanica Sinica (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s10409-015-0482-x

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zbMATH Keywords

micro-electromechanical systems (MEMS)micro-polar theorythin film damping

Mathematics Subject Classification ID

Electromagnetic effects in solid mechanics (74F15) Rods (beams, columns, shafts, arches, rings, etc.) (74K10) Thin films (74K35) Micromechanics of solids (74M25)

Cites Work

• Investigation of the size effects in Timoshenko beams based on the couple stress theory
• The size-dependent natural frequency of Bernoulli-Euler micro-beams
• Linear theory of nonlocal elasticity and dispersion of plane waves
• Theory of thermomicrofluids
• The Squeezing of a Fluid Between Two Plates
• Self-similar solution of incompressible micropolar boundary layer flow over a semi-infinite plate
• Bifurcation analysis of a capacitive micro-resonator considering non-local elasticity theory
• Microchannels flow modelling with the micropolar fluid theory
• The MEMS handbook
• Effects of axial and residual stresses on thermoelastic damping in capacitive micro-beam resonators

Cited In (3)

• Nonlinear dynamics of a tunable novel accelerometer, tunable with a microtriple electrode variable capacitor
• Anharmonic 1D actuator model including electrostatic and Casimir forces with fractional damping perturbed by an external force
• Energy dissipation in microfluidic beam resonators

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