From microelectronics to nanoelectronics: mathematical challenges

MaRDI QIDQ3398650zbMATH OpenFDO

Authors Angelo Marcello Anile, Vittorio Romano

Publication date 29 September 2009

zbMATH Keywords

transport theorycontinuum modelselectromagnetic couplingnanoelectronics

Mathematics Subject Classification ID

Finite difference methods for boundary value problems involving PDEs (65N06) Finite element, Rayleigh-Ritz and Galerkin methods for boundary value problems involving PDEs (65N30) Transport processes in time-dependent statistical mechanics (82C70) Statistical mechanics of semiconductors (82D37) Statistical mechanics of nanostructures and nanoparticles (82D80)

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Cited in

(6)

• The predictive technology model in the late silicon era and beyond
• Preface
• Technology and Device Modeling in Micro and Nano-electronics: Current and Future Challenges
• Modeling of processes in tunneling lithography
• Perspectives in semiconductor device simulation
• Mathematical modelling in microphysical technology

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