Technology and Device Modeling in Micro and Nano-electronics: Current and Future Challenges

DOI10.1007/978-3-540-71980-9_3zbMath1130.78016OpenAlexW49703944MaRDI QIDQ5432103

Andrea Marmiroli, Gianpietro Carnevale, Andrea Ghetti

Publication date: 2 January 2008

Published in: Scientific Computing in Electrical Engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/978-3-540-71980-9_3

zbMATH Keywords

Boltzmann equationSchrödinger equationPoisson equationnano-electronicssilicon oxidationcoupled physical effectsmicro-electronics

Mathematics Subject Classification ID

Monte Carlo methods (65C05) Diffusion (76R50) Rarefied gas flows, Boltzmann equation in fluid mechanics (76P05) Diffraction, scattering (78A45) Electromagnetic theory (general) (78A25) General topics in optics and electromagnetic theory (78A99)